Full Description

This standard defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms, and particles). This standard is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment, and devices.

Product Details

Edition: 1st Published: 03/01/2013 Number of Pages: 36File Size: 1 file , 3.7 MB