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ISO 25178-604:2013
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ISO 25178-604:2013 Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
standard by International Organization for Standardization, 08/01/2013
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ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.